Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
نویسندگان
چکیده
A multichannel ellipsometer in the dual rotating-compensator configuration has been designed and constructed for applications in real time Mueller matrix ellipsometry (approx. 2–5 eV) of anisotropic surfaces and films. The sequence of optical elements for this instrument is denoted PC (v )SC (v )A, where P, S, and A represent the polarizer, sample, and analyzer. C (v ) and 1r 1 2r 2 1r 1 C (v ) represent two MgF biplate compensators that rotate at frequencies of v y2ps10 Hz and v y2ps6 Hz, synchronized 2r 2 2 1 2 for a ratio v :v of 5:3. Spectra in the 16 Mueller matrix elements of a transmitting or reflecting sample can be established from 1 2 the 25 non-zero Fourier coefficients of the irradiance waveform acquired in a single 0.25 s optical cycle. Initial high speed Mueller matrix measurements have been performed on weakly anisotropic samples that push the instrument to its precisiony accuracy limits. These include the (110) Si surface with maximum cross-polarization ellipsometric angles of c ;0.18 and ps nanostructured thin films with maximum c ;18. ps 2003 Elsevier B.V. All rights reserved.
منابع مشابه
Synchrotron radiation-based far-infrared spectroscopic ellipsometer with full Mueller-matrix capability.
We developed far-IR spectroscopic ellipsometer at the U4IR beamline of the National Synchrotron Light Source in Brookhaven National Laboratory. This ellipsometer is able to measure both, rotating analyzer and full-Mueller matrix spectra using rotating retarders, and wire-grid linear polarizers. We utilize exceptional brightness of synchrotron radiation in the broad spectral range between about ...
متن کاملThe influences of roughness on film t ickness measurements by Mueller matrix eiiipsometry
The accuracy of measurement of the thickness of uniform thin films on solid substrates by null ellipsometry is severely limited when the substrate is rough. It is impossible to separate these two effects experimentally with the null ellipsometer, and there is no theoretical basis or generally used model available to separate these effects. Thus, a dual rotating-compensator Mueller matrix ellips...
متن کاملCuticle structure of the scarab beetle Cetonia aurata analyzed by regression analysis of Mueller-matrix ellipsometric data.
Since one hundred years it is known that some scarab beetles reflect elliptically and near-circular polarized light as demonstrated by Michelson for the beetle Chrysina resplendens. The handedness of the polarization is in a majority of cases left-handed but also right-handed polarization has been found. In addition, brilliant colors with metallic shine are observed. The polarization and color ...
متن کاملCombined Spatial Filter and Relay Systems in Rotating Compensator Ellipsometer/Polimeter
Liphardt et al. (*) Notice: Subject to any disclaimer, the term of this patent is extended or adjusted under 35 U.S.C. 154(b) by 0 days. This patent is subject to a terminal dis-claimer. ABSTRACT Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2004